Self-assembled Co nanorods in diamond-like carbon thin films synthesized by plasma-assisted magnetron sputtering

Wang, F. L.; Jiang, J. C.; Meletis, F. I.
September 2003
Applied Physics Letters;9/22/2003, Vol. 83 Issue 12, p2423
Academic Journal
We report on self-assembled, high-aspect-ratio nanostructures of Co rods in diamond-like carbon (DLC) thin films synthesized by plasma-assisted magnetron sputtering. Cross-sectional and plan-view transmission electron microscopy investigations show that the nanorods continuously grow vertically to the substrate and have a relatively narrow distributed lateral size. The nanorods in the as-deposited thin films are found to have an [variant_greek_epsilon]-Co structure with a high density of defects and are encapsulated by 1–2 nm of an amorphous DLC matrix. © 2003 American Institute of Physics.


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