High-efficiency, high-power, stable 172 nm xenon excimer light source

Salvermoser, M.; Murnick, D.E.
September 2003
Applied Physics Letters;9/8/2003, Vol. 83 Issue 10, p1932
Academic Journal
Stable, continuous-wave light sources at 172 nm, based on the Xe[sub 2][sup *] excimer molecule, with conversion efficiency of electrical energy to vacuum ultraviolet (VUV) light greater than 50%, are reported. In high-pressure xenon gas, “Saint Elmo’s Fire” corona discharges serve as localized point electron sources with a metal grid at a few kilovolts providing an accelerating electric field. An extended VUV light-emitting region with high-energy conversion efficiency indicates that electron energy loss is predominantly by excitation of Xe atoms rather than by ionization. A room-temperature prototype lamp with variable VUV power to 35 mW/cm[sup 2] has been demonstrated. © 2003 American Institute of Physics.


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