Proton beam writing of low-loss polymer optical waveguides

Sum, T. C.; Bettiol, A. A.; van Kan, J. A.; Watt, F.; Pun, E. Y. B.; Tung, K. K.
September 2003
Applied Physics Letters;9/1/2003, Vol. 83 Issue 9, p1707
Academic Journal
Proton beam writing is a direct-write micromachining technique capable of producing three-dimensional microstructures with straight and smooth sidewalls. Low-loss channel waveguides in SU-8, a chemically amplified negative tone resist, were fabricated using a focused submicron beam of 2.0 MeV protons with a dose of 30 nC/mm[sup 2] and a beam current of approximately 2 pA. Propagation losses of approximately (0.19±0.03) dB/cm were measured at 632.8 nm wavelength. Waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits. © 2003 American Institute of Physics.


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