Superior Schottky electrode of RuO[sub 2] for deep level transient spectroscopy on anatase TiO[sub 2]

Takahira Miyagi; Masayuki Kamei; Takefumi Mitsuhashi; Atsushi Yamazaki
September 2003
Applied Physics Letters;9/1/2003, Vol. 83 Issue 9, p1782
Academic Journal
An anatase TiO[sub 2] film was epitaxially grown on a conductive Nb-doped single-crystalline SrTiO[sub 3] (100) substrate by metalorganic chemical vapor deposition. RuO[sub 2] Schottky electrode was fabricated on the epitaxial anatase film by reactive dc magnetron sputtering. The dark I–V and capacitance–voltage characteristics indicated the good rectification and thermal stability of the RuO[sub 2]/anatase junction. This RuO[sub 2]/anatase junction enables the stable measurements of deep level transient spectroscopy in the high-temperature region and is a promising Schottky electrode to examine the origins of deep levels in the band gap of anatase. © 2003 American Institute of Physics.


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