Electron heating mode transition observed in a very high frequency capacitive discharge

Abdel-Fattah, E.; Sugai, H.
August 2003
Applied Physics Letters;8/25/2003, Vol. 83 Issue 8, p1533
Academic Journal
The effect of excitation frequency in the 13.56–60 MHz range on the electron energy distribution function (EDF) of capacitively coupled plasma is investigated. Under a fixed rf voltage (50–130 V peak-to-peak) and argon pressure (100 mTorr), a remarkable change in the EDF is observed: a Druyvesteyn type at low frequencies (≃13.56 MHz) evolves into a bi-Maxwellian type in a very high frequency (VHF) above 30 MHz. The transition frequency decreases with increasing the rf voltage. The observed frequency effect on the EDF is tentatively explained in terms of the transition of electron heating mode from the collisional ohmic heating at low frequencies into the plasma surface heating in the VHF range. © 2003 American Institute of Physics.


Related Articles

  • Kinetic effects of electron thermal conduction on implosion hydrodynamics. Nishiguchi, A.; Mima, K.; Azechi, H.; Miyanaga, N.; Nakai, S. // Physics of Fluids B: Plasma Physics;Feb92, Vol. 4 Issue 2, p417 

    The kinetic effects of electron heat transport in an imploding plasma are investigated by using the one-dimensional hydrodynamics implosion code with the Fokker–Planck equation. The Fokker–Planck equation is solved in the implosion simulation by reducing it to the multigroup...

  • Neoclassical electron and ion transport in toroidally rotating plasmas. Sugama, H.; Horton, W. // Physics of Plasmas;Jun97, Vol. 4 Issue 6, p2215 

    Investigates neoclassical transport processes of electrons and ions for toroidally rotating axisymmetric plasmas with large flow velocities on the order of ion thermal speed. Onsager relations for flow-dependent neoclassical transport coefficients; Symmetry properties of the drift kinetic...

  • Effects of orbit squeezing on transport fluxes. Shaing, K.C.; Zarnstorff, M.C. // Physics of Plasmas;Nov97, Vol. 4 Issue 11, p3928 

    Studies the effects of orbit squeezing on electron transport fluxes. Influence of the electron viscous coefficient and the ion viscous coefficient; Satisfaction of the condition for plasmas, such as those in enhanced reversed shear mode; Transport fluxes for standard squeezed banana orbits and...

  • Role of anomalous electron transport in a stationary plasma thruster simulation. Hagelaar, G. J. M.; Bareilles, J.; Garrigues, L.; Boeuf, J.-P. // Journal of Applied Physics;1/1/2003, Vol. 93 Issue 1, p67 

    Stationary plasma thrusters (SPTs) are advanced propulsion devices that use a gas discharge to ionize and accelerate the propellant. We present simulation results obtained with a two-dimensional hybrid model of an SPT discharge. The model characterizes the ill-understood anomalous electron...

  • Long-term stability of a one-dimensional current-driven double layer. Hori, Naoko; Yamamoto, Takashi // Physics of Fluids (00319171);Aug88, Vol. 31 Issue 8, p2135 

    Long-term (> an electron transit time over the system) stability of a one-dimensional currentdriven double layer is studied by use of numerical experiments using particles. In these experiments, the potential difference across the system is self-consistently determined by the space charge...

  • The theory and simulation of relativistic electron beam transport in the ion-focused regime. Swanekamp, Stephen B.; Holloway, James Paul; Kammash, Terry; Gilgenbach, Ronald M. // Physics of Fluids B: Plasma Physics;May92, Vol. 4 Issue 5, p1332 

    Several recent experiments involving relativistic electron beam (REB) transport in plasma channels show two density regimes for efficient transport; a low-density regime known as the ion-focused regime (IFR) and a high-pressure regime. The results obtained in this paper use three separate models...

  • Collisionless electron temperature gradient instability. Lee, Y. C.; Dong, J. Q.; Guzdar, P. N.; Liu, C. S. // Physics of Fluids (00319171);May87, Vol. 30 Issue 5, p1331 

    The stability of electron temperature gradient driven modes in a collisionless plasma with magnetic shear has been studied. Two coupled integral equations for the electrostatic and vector potentials have been solved numerically. The properties of these modes derived on the basis of numerical...

  • The evidence for nonlocal transport in the Texas Experimental Tokamak. Gentle, K.W.; Bravenec, R.V.; Cima, G.; Hallock, G.A.; Phillips, P.E.; Ross, D.W.; Rowan, W.L.; Wootton, A.J.; Crowley, T.P.; Ourua, A.; Schooch, P.M.; Watts, C. // Physics of Plasmas;Oct97, Vol. 4 Issue 10, p3599 

    Reports on the electron temperature response to a tokamak to rapid edge cooling that has characteristics difficult to reconcile with local transport analysis. Extension of the initial observations in the Texas Experimental Tokamak to a wider range of plasma and perturbation parameters.

  • Electron transport anomaly in a plasma in an intense radiation field. Silin, V. P. // JETP Letters;7/10/96, Vol. 64 Issue 1, p21 

    It is shown that in an intense radiation field the electron friction force resulting from electron–ion collisions becomes an electron accelerating force on account of absorption of radiation by electrons. It is pointed out that the thermal conductivity increases. © 1996 American...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics