TITLE

High-frequency, high-sensitivity acoustic sensor implemented on ALN/Si substrate

AUTHOR(S)
Caliendo, C.; Imperatori, P.
PUB. DATE
August 2003
SOURCE
Applied Physics Letters;8/25/2003, Vol. 83 Issue 8, p1641
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
AlN films, 1.6–6.3 μm thick, were sputtered at 200 °C on Si(100) and Si(111) substrates. The films were crack-free, uniform, and c-axis oriented. The experimental phase velocities of surface acoustic waves (SAW) propagating in the AlN/Si structures were estimated and showed only a small discrepancy (20–40 m/s) compared to the calculated theoretical values. A SAW resonator (SAWR)-based chemical sensor, operating at about 700 MHz, was implemented on AlN/Si. The SAWR surface was covered with a polymer film sensitive to relative humidity (RH) changes, already tested for RH sensing in previous works on SAW delay lines implemented on AlN/Si and ZnO/Si and operating at about 130 MHz. The RH mass sensitivity and the detection limit of the SAWR sensor improved by 38% and by one order of magnitude, respectively, compared to the delay line-based sensors previously tested. © 2003 American Institute of Physics.
ACCESSION #
10603811

 

Related Articles

  • Substrateless micrometric metal mesh for mid-infrared plasmonic sensors. Mattioli, F.; Ortolani, M.; Lupi, S.; Limaj, O.; Leoni, R. // Applied Physics A: Materials Science & Processing;Jun2011, Vol. 103 Issue 3, p627 

    We report on the fabrication and optical properties of thin metal films periodically patterned with square hole arrays of 2 micron pitch, which behave as substrateless plasmonic devices at mid-infrared frequencies. Large (3×3 mm) meshes were fabricated by metallizing a patterned silicon...

  • Microbalance chemical sensor based on thin-film bulk acoustic wave resonators. Benetti, M.; Cannatà, D.; Di Pietrantonio, F.; Foglietti, V.; Verona, E. // Applied Physics Letters;10/24/2005, Vol. 87 Issue 17, p173504 

    An electroacoustic chemical sensor based on thin-film bulk acoustic wave resonators (TFBAR) is presented. It operates on the same principle of the well-known quartz crystal micro-balance, at an operation frequency extended up to several GHz. The larger output signal, associated to the higher...

  • Surface Plasmon -- Cobalt Phthalocyanine Sensor for NO2 gas. El-Bosaty, A. B.; El-Brolossy, T. A.; Abdalla, S.; Negm, S.; Abdella, R. A.; Talaat, H. // Egyptian Journal of Solids;2006, Vol. 29 Issue 1, p121 

    Surface plasmon resonance (SPR) based sensors using Ag thin films have been successfully applied for detection of nitrogen dioxide (NO2) gas. The SPR sensors have Cobalt Phthalocyanine (Co-Pc) as active add layer. Surface plasmon was generated via a prism coupler in Kretschmann configuration. It...

  • Young’s modulus of amorphous Terfenol-D thin films. Su, Q.; Morillo, J.; Wen, Y.; Wuttig, M. // Journal of Applied Physics;9/15/1996, Vol. 80 Issue 6, p3604 

    Provides information on a study which determined Young's modulus of amorphous Terfenol-D films utilizing the resonances of Terfenol-D/silicon composite cantilevers. Function of Terfenol-D thin film; Methodology of the study; Results and discussion.

  • Fatigue rates of monocrystalline silicon thin films in harsh environments: Influence of stress amplitude, relative humidity, and temperature. Theillet, P.-O.; Pierron, O. N. // Applied Physics Letters;5/4/2009, Vol. 94 Issue 18, p181915 

    This study investigates the separate influence of stress, temperature, and relative humidity (RH) on the fatigue behavior of 10-μm-thick, monocrystalline silicon (Si) films at 40 kHz, under fully reversed loading. The fatigue rates are most sensitive to stress, with four orders of magnitude...

  • A calibrated graphene-based chemi-sensor for sub parts-per-million NO2 detection operating at room temperature. Ricciardella, F.; Massera, E.; Polichetti, T.; Miglietta, M. L.; Di Francia, G. // Applied Physics Letters;5/5/2014, Vol. 104 Issue 18, p1 

    Here, we present a room temperature operating chemi-sensor based on a graphene film that shows sensitivity to NO2 up to a 50 parts-per-billion (ppb) with extremely limited interference from relative humidity and can be also calibrated in a sub-parts-per-million (ppm) range with a response and...

  • Fabrication of ultra-sensitive optical fiber based humidity sensor using TiO2 thin film. S. K. Shukla; Anand Bharadvaja; G. K. Parashar; A. P. Mishra; G. C. Dubey; Ashutosh Tiwari // Advanced Materials Letters;Nov2012, Vol. 3 Issue 5, p365 

    Thin films of titanium dioxide in anatase form have been prepared using isobutyl titanate as precursor. The resulting TiO2 was coated on an U-shaped pyrex glass rod to sense the humidity of a controlled humid environment using optical fiber approach. The humidity sensing characteristics and the...

  • Properties of tungsten oxide thin films formed by ion-plasma and laser deposition methods for MOSiC-based hydrogen sensors. Fominski, V.; Grigoriev, S.; Romanov, R.; Zuev, V.; Grigoriev, V. // Semiconductors;Mar2012, Vol. 46 Issue 3, p401 

    Thin-film structures based on gas-sensitive tungsten oxide and catalytic platinum are fabricated by room-temperature deposition on a silicon carbide wafer using pulsed laser and ion-plasma methods. Oxide layer annealing in air to 600°C caused the formation of microstructured and...

  • Thin-film sensing using circular split-ring resonators at mm-wave frequencies. Elhawil, Amna; Stiens, Johan; Tandt, Cathleen; Ranson, Willy; Vounckx, Roger // Applied Physics A: Materials Science & Processing;Jun2011, Vol. 103 Issue 3, p623 

    In this paper, we investigate a thin-film sensing approach using split-ring resonators. The sensitivity based on tuned magnetic resonance has been demonstrated using three methods: by depositing the film in the gap, under the rings as an intermediate layer and on the rings as an overlayer. The...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics