Three-dimensional micro-channels in polymers: one-step fabrication

Yamasaki, K.; Juodkazis, S.; Matsuo, S.; Misawa, H.
August 2003
Applied Physics A: Materials Science & Processing;2003, Vol. 77 Issue 3/4, p371
Academic Journal
We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.


Related Articles

  • Micro-lens arrays generated by UV laser irradiation of doped PMMA. Beinhorn, F.; Ihlemann, J.; Luther, K.; Troe, J. // Applied Physics A: Materials Science & Processing;1999, Vol. 68 Issue 6, p709 

    Abstract. Micro-lenses with well-defined optical parameters are generated on polymethylmethacrylate (PMMA) substrates doped with diphenyltriazene (DPT) by controlled use of a swelling effect generated under conditions of subablative excimer laser illumination. The surface profiles depend on the...

  • Precise laser ablation processing of black widow spider silk. Moore, A.; Koch, M.; Mueller, K.; Stuke, M. // Applied Physics A: Materials Science & Processing;2003, Vol. 77 Issue 3/4, p353 

    Contact-free precise laser processing of black widow spider (Latrodectus hesperus) dragline silk by laser ablation at γ = 157 nm is achieved. At this wavelength, the small optical penetration depth, below 100 nm, allows efficient and gentle material removal above the ablation threshold of...

  • Bleaching and Darkening Effect in Photochromic Glasses under Irradiation with Femtosecond Laser Pulses. Jamshidi-Ghaleh, K. // Acta Physica Polonica, A.;Oct2009, Vol. 116 Issue 4, p501 

    In this paper, the photochromic oxide glass sample under interaction of 200 fs laser pulses at 800 nm wavelength is studied. Two types of laser-induced modifications, bleaching and darkening, are observed. The induced darkening is observed inside the bleached volume. The effect of incident laser...

  • Resist heating in excimer laser lithography. Abe, Takayuki; Arikado, Tsunetoshi; Takigawa, Tadahiro // Journal of Applied Physics;2/15/1988, Vol. 63 Issue 4, p1235 

    Investigates the intensity dependence of the photochemical reaction rate for excimer laser beam irradiation to resist. Estimation of the temperature rise of the resist; Relationship between resist sensitivity and laser intensity; Calculation of the activation energy of the...

  • Direct fabrication of micro mesas by VUV laser ablation of polymers: PMMA (polymethylmethacrylate). Lapczyna, M.; Stuke, M. // Applied Physics A: Materials Science & Processing;1998, Vol. 66 Issue 4, p473 

    Abstract. Mesa-like microstructures in PMMA are ablated by VUV laser irradiation at 157 nm using a water-based masking fluid as a contact mask. Smooth structures without diffraction patterns can be generated. Air bubbles, injected into the mask by means of a capillary, offer the possibility of...

  • PMMA and FEP surface modifications induced with EUV pulses in two selected wavelength ranges. Bartnik, A.; Fiedorowicz, H.; Jarocki, R.; Kostecki, J.; Szczurek, M. // Applied Physics A: Materials Science & Processing;Jan2010, Vol. 98 Issue 1, p61 

    Surface modification of PMMA and FEP polymers using extreme ultraviolet (EUV) in two spectral ranges was investigated. A laser-plasma EUV source based on a double stream gas puff target equipped with an Au coated ellipsoidal collector was used for the experiment. The spectrum of the focused...

  • Examination of the influence of molecular weight on polymer laser ablation: polystyrene at 248 nm. Rebollar, Esther; Bounos, Giannis; Selimis, Alexandros; Castillejo, Marta; Georgiou, Savas // Applied Physics A: Materials Science & Processing;Sep2008, Vol. 92 Issue 4, p1043 

    Following previous studies on the influence of the polymer molecular weight (MW) on the ablation of poly(methyl methacrylate) (PMMA) at 248 nm, this work extends the examination to the ablation of polystyrene (PS) at 248 nm. The ablation threshold and the etching rates are found to be nearly...

  • F[sub 2] -laser ablation patterning of dielectric layers. Schäfer, D.; Ihlemann, J.; Marowsky, G.; Herman, P.R. // Applied Physics A: Materials Science & Processing;2001, Vol. 72 Issue 3, p377 

    Abstract. Spatially defined patterning of multi-layer dielectric optical systems by laser-induced ablation is demonstrated. A 49-layer high-reflectivity mirror for 193-nm light was irradiated with F[sub 2]-1aser light through the CaF[sub 2]-substrate to cleanly remove the whole dielectric stack...

  • Micromachining of Polymethylmethacrylate and Polydimethylsiloxane Using Laser Plasma Soft X-rays. Torii, Shuichi; Makimura, Tetsuya; Okazaki, Kota; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Kouichi // Journal of Laser Micro / Nanoengineering;2011, Vol. 6 Issue 3, p235 

    We have investigated micromachining of polymethylmetacrylate (PMMA) and polydimethylsil-ioxan (PDMS) by irradiation with laser plasma soft X-rays. We generated wide band soft X-rays around 10 nm by irradiation of Ta targets with Nd:YAG laser light. In addition, narrow band soft X-rays at 11 nm...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics