TITLE

Three-dimensional micro-channels in polymers: one-step fabrication

AUTHOR(S)
Yamasaki, K.; Juodkazis, S.; Matsuo, S.; Misawa, H.
PUB. DATE
August 2003
SOURCE
Applied Physics A: Materials Science & Processing;2003, Vol. 77 Issue 3/4, p371
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.
ACCESSION #
10284208

 

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