Near-surface characterization of amorphous carbon films by neutron reflectivity

Johnson, J. A.; Woodford, J. B.; Erdemir, A.; Fenske, G. R.
July 2003
Applied Physics Letters;7/21/2003, Vol. 83 Issue 3, p452
Academic Journal
A high-density top-surface layer of approximately 30 Ã… was found in a form of diamondlike carbon, "near-frictionless carbon," developed at Argonne National Laboratory. Three diamondlike-carbon films were prepared by plasma-enhanced chemical vapor deposition with different hydrogen-to-methane ratios in the plasma. Complementary films were prepared with deuterated methane and deuterium, in the same ratios. Results from neutron relectivity experiments are presented, along with model comparisons, and a hypothesis is postulated.


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