Measurement of the elastic constants of textured anisotropic thin films from x-ray diffraction data

Renault, P.-O.; Le Bourhis, E.; Villain, P.; Goudeau, Ph.; Badawi, K. F.; Faurie, D.
July 2003
Applied Physics Letters;7/21/2003, Vol. 83 Issue 3, p473
Academic Journal
The elastic constants (compliances s[SUBij]) of a textured anisotropic thin film deposited on a substrate have been determined. Using x-ray diffraction to measure the intragranular strain and a tensile machine to deform in situ the samples, an analytical method is described and has been developed for fiber textured thin films. The determination of thin film compliances only requires the knowledge of the substrate elastic constants. In the case of a 260-nm-thin gold film, the compliances were found to be slightly different from the corresponding bulk material ones.


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