Conductivity-based contact sensing for probe arrays in dip-pen nanolithography

Zou, Jun; Bullen, David; Wang, Xuefeng; Liu, Chang; Mirkin, Chad A.
July 2003
Applied Physics Letters;7/21/2003, Vol. 83 Issue 3, p581
Academic Journal
This letter reports a contact sensing method for dip-pen nanolithography which functions by monitoring the conductivity between the lithography probe and the substrate. Experimental results show that this method has high sensitivity and is suitable for dip-pen nanolithography applications with large probe arrays.


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