Three-beam interference method for measuring very thin films

Leizerson, I.; Lipson, S. G.
July 2003
Applied Physics Letters;7/14/2003, Vol. 83 Issue 2, p260
Academic Journal
We present an experimental method which allows the real time measurement of the thickness of a thin film on a transparent substrate in an imaging mode. Imaging ellipsometry cannot be used for such problems because of reflections from the backsurface of the substrate. Its application to the measurement of water films down to 30 Ã… on mica is described. The sensitivity is found to be comparable to that of imaging ellipsometry. We investigate the relationship between thickness resolution and spatial resolution and give an optional modification of the method which can be applied to opaque substrates.


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