AlGaAs superlattice microcoolers

Zhang, Jizhi; Anderson, Neal G.; Lau, Kei May
July 2003
Applied Physics Letters;7/14/2003, Vol. 83 Issue 2, p374
Academic Journal
AlGaAs-based superlattice microcoolers are demonstrated. Maximum cooling temperatures of 0.8 °C and 2 °C were obtained at 25 °C and 100 °C, respectively, from 60 μm × 60 μm devices with 100 period Al[SUB0.10]Ga[SUB0.90]As/Al[SUB0.20]Ga[SUB0.80]As n-type superlattice thermal barriers. These devices may be useful for in situ cooling of GaAs-based microelectronic and optoelectronic devices.


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