Effect of surface treatment on leakage current of GaAs/AlGaAs laser microcavities

Kim, Jun-Youn; Lee, Jawoong; Kim, Jungyeon; Kang, Bongkoo; Kwon, O’Dae
June 2003
Applied Physics Letters;6/23/2003, Vol. 82 Issue 25, p4504
Academic Journal
The effect of surface treatment on leakage current is investigated for two structures of the electropumped GaAs/AlGaAs laser microcavities, one with mesa and the other with hyperboloid-drum structures. Using surface sheet resistivity as a figure-of-merit parameter, the results of different surface treatment methods are compared. The best result is obtained when the sample has been polished in a H[SUB2]SO[SUB4]:H[SUB2]O[SUB2]:H[SUB2]O = 1:8:1000 solution for 5 s, and treated subsequently in a 6% excess sulfur-containing (NH[SUB4])[SUB2]S[SUBx] (solution at 60 °C for 8 mins. The treatment in (NH[SUB4])[SUB2]S[SUBx] solution increases the surface sheet resistivity by a factor of ∼ 14. The cross-sectional shape of the cavity and the vertical profile of distributed Bragg reflector mirrors have little correlation with the leakage current.


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