TITLE

AE Releases Xstream Plasma-Source Platform

PUB. DATE
June 2003
SOURCE
Electronic News;6/9/2003, Vol. 49 Issue 23, pN.PAG
SOURCE TYPE
Trade Publication
DOC. TYPE
Article
ABSTRACT
Introduces the Xstream plasma-source platform from Advanced Energy Industries Inc. for semiconductor applications. Features of the platform; Capabilities of the platform.
ACCESSION #
10016944

 

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